Coordinate transformation and its uncertainty under consideration of a non-orthogonal coordinate base
نویسندگان
چکیده
Nanopositioning and nanomeasuring machines are 3D coordinate measuring systems with nanometer precision at measurement volumes in the cubic centimeter range. The base is formed by an interferometer system a common mirror corner. orthogonality deviations of corner require transformation axes. uncertainty must be taken into account overall budget. Starting from complete model, result model simplications on behaviour analysed discussed.
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ژورنال
عنوان ژورنال: Measurement Science and Technology
سال: 2021
ISSN: ['0957-0233', '1361-6501']
DOI: https://doi.org/10.1088/1361-6501/aba3f5